The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

Thin Solid Films

Volumn 516, Issue 7, 2008, Pages 1365-1369

  Meng, Li Jian ^a,b   Gao, Jinsong ^c   dos Santos, M P ^d   Wang, Xiaoyi ^c   Wang, Tongtong ^c  

^a INSTITUTO SUPERIOR DE ENGENHARIA DO PORTO   (Portugal)

^b UNIVERSITY OF MINHO   (Portugal)

^c CHANGCHUN INSTITUTE OF OPTICS   (China)

^d UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

Ion beam assisted deposition; ITO; Polycarbonate; Thin film

Indexed keywords

OXIDE FILMS; POLYCARBONATES; THIN FILMS; TIN OXIDES; X RAY DIFFRACTION;

ELECTROMAGNETIC WAVE SHIELDING; ELLIPSOMETRIC SPECTRA; ION BEAM ENERGY;

ION BEAM ASSISTED DEPOSITION;

EID: 38649129945     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.159     Document Type: Article

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