Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Thin Solid Films

Volumn 298, Issue 1-2, 1997, Pages 221-227

  Wu, Wen Fa ^a   Chiou, Bi Shiou ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Coatings; Indium oxide; Optical properties; Sputtering

Indexed keywords

ELECTRIC PROPERTIES; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; OXYGEN; POLYCARBONATES; REFRACTIVE INDEX; SPUTTER DEPOSITION;

EXTINCTION COEFFICIENT; INDIUM TIN OXIDE;

CONDUCTIVE FILMS;

EID: 0031124044     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09311-X     Document Type: Article

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