Transparent indium tin oxide films prepared by ion-assisted deposition with a single-layer overcoat

Optical Engineering

Volumn 38, Issue 6, 1999, Pages 953-957

  Gilo, Mordechal ^a   Dahan, Reuben ^a   Croitoru, Nathan ^b  

^a Elbit Systems Electro Optics Elop Limited   (Israel)

^b TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DEPOSITION; DIFFUSION IN SOLIDS; ELECTRON BEAMS; ELECTRON GUNS; INDIUM COMPOUNDS; ION BOMBARDMENT; ION SOURCES; OPTICAL COATINGS; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS;

ION ASSISTED DEPOSITION (IAD);

OPTICAL FILMS;

EID: 0032623698     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602135     Document Type: Article

References (14)

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