Growth temperature dependence of structural properties for AlN films grown on (Mn,Zn)Fe2O4 substrates

Thin Solid Films

Volumn 435, Issue 1-2, 2003, Pages 218-221

  Ohta, J ^a   Fujioka, H ^a   Ito, S ^a   Oshima, M ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Aluminium nitride; Interfaces; Laser ablation; Structural properties

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; FILM GROWTH; LASER ABLATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; X RAY DIFFRACTION;

HETEROINTERFACES;

THIN FILMS;

EID: 0038009055     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00357-2     Document Type: Conference Paper

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