Deposition and characterization of reactive magnetron sputtered aluminum nitride thin films for film bulk acoustic wave resonator

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4819-4825

  Chiu, Kuan Hsun ^a   Chen, Jiann Heng ^b   Chen, Hong Ren ^c   Huang, Ruey Shing ^a,c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL CHI NAN UNIVERSITY   (Taiwan)

^c ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Aluminum nitride; Radio frequency sputter

Indexed keywords

ACOUSTIC WAVES; CHARACTERIZATION; DEPOSITION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; RESONATORS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

FIELD-EMISSION SCANNING ELECTRON MICROSCOPY (FESEM); FILM BULK ACOUSTIC WAVE RESONATORS; RADIO FREQUENCY SPUTTER;

ALUMINUM COMPOUNDS;

EID: 33847217241     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.12.181     Document Type: Article

References (12)

1. Ristic V.M. Principles of Acoustic Devices (1983), Krieger Pub Co, Toronto Ontario
2. Ruiz E., Alvarez S., and Alemany P. Phys. Rev., B, Condens. Matter Mater. Phys. 49 (1994) 7115
3. Clemente R.R., Aspar B., Azema N., Armas B., Combescure C., Durand J., and Figueras A. J. Cryst. Growth 133 (1993) 59
4. Okano H., Takahashi Y., Tanaka T., Shibata K., and Nakano S. Jpn. J. Appl. Phys, Part 1 31 (1992) 3446
5. Liaw H.M., Cronin W., and Hickernell F.S. Proceedings of IEEE 1993 Ultrasonics Symposium, Baltimore, MD, October 31-November 3, 1993, IEEE (1993) 267
6. Naik R.S., Lutsky J.J., Reif R., Sodini C.G., Becker A., Fetter L., Huggins H., Miller R., Pastalan J., Rittenhouse G., and Wong Y.H. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47 (2000) 292
7. Cheng C.C., Chen Y.C., Wang H.J., and Chen W.R. J. Vac. Sci. Technol., A, Vac. Surf. Films 14 (1996) 2238
8. Naik R.S., Reif R., Lutsky J.J., and Sodini C.G. J. Electrochem. Soc. 146 (1999) 691
9. Powder Diffraction File, JCPDS-International Centre for Diffraction Data, ICDD, Newtown Square, PA, 1998, Card No. 25-1133.
10. Jones F., and Logan J.S. IBM J. Res. Dev. 34 (1990) 680
11. Smith D.L. Thin Film Deposition (1995), McGraw-Hill, New-York NY
12. Chiu G.S., Lu J.M., Lee S.P., Chen H.R., and Huang R.S. Asia-Pacific Conference of Transducers and Micro-Nano Technology, Marina Mandarin Hotel, Singapore, June 25-28, 2006, APCOT (2006) 257