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Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 203-207

Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

(3) Kim, Do Geun a,b Seong, Tae Yeon b Baik, Young Joon a

a Korea Institute of Science and Technology (South Korea)

b Gwangju Institute of Science and Technology (GIST) (South Korea)

Author keywords

Auger electron spectroscopy (AES); Oxidation; Superlattices; TiN AlN multilayers; X Ray diffraction

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ION BEAM ASSISTED DEPOSITION; OXIDATION; SEMICONDUCTOR SUPERLATTICES; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

BACK-SCATTERED ELECTRON IMAGING (BSED);

MULTILAYERS;

EID: 0035500217 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01407-9 Document Type: Article

Times cited : (27)

References (16)

1
- 21544437674
- (1987) J. Appl. Phys. , vol.62 , pp. 481
- Helmersson, U.¹ Todorova, S.² Barnett, S.A.³ Sundgren, J.E.⁴ Markert, L.C.⁵ Greene, J.E.⁶

2
- 0000961419
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2654
- Mirakami, P.B.¹ Hultman, L.² Barnett, S.A.³

3
- 0026852996
- (1992) J. Mater. Res. , vol.7 , pp. 901
- Shinn, M.¹ Hultman, L.² Barnett, S.A.³

4
- 5744252400
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1211
- Li, D.¹ Lin, X.W.² Chen, S.C.³ Dravid, V.P.⁴ Chung, Y.W.⁵ Wong, M.S.⁶ Sproul, W.D.⁷

5
- 0030383011
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 225
- Setoyama, M.¹ Nakayama, A.² Tanaka, M.³ Kitagawa, N.⁴ Nomura, T.⁵

6
- 0032357941
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3341
- Wang, Y.Y.¹ Wong, M.S.² Chia, W.J.³ Rechner, J.⁴ Sproul, W.D.⁵

7
- 0032675903
- (1999) Thin Solid Films , vol.341 , pp. 126
- Setoyama, M.¹ Irie, M.² Ohara, H.³ Tsujioka, M.⁴ Takeda, Y.⁵ Nomura, T.⁶ Kitagawa, N.⁷

8
- 0002745024
- in preparation
- Kim, D.G.¹ Seong, T.-Y.² Baik, Y.J.³

9
- 25544459890
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2717
- Münz, W.D.¹

10
- 0023434695
- (1987) J. Solid-State Chem. , vol.70 , pp. 318
- Kenotek, O.¹ Leyendecker, T.²

11
- 0027589685
- (1993) Thin Solid Films , vol.228 , pp. 238
- Tanaka, Y.¹ Gür, T.M.² Kelly, M.³ Hagstrom, S.T.⁴ Ikeda, T.⁵

12
- 0000911315
- (1991) J. Appl. Phys. , vol.69 , pp. 6437
- Adibi, F.¹ Petrov, I.² Hultman, L.³ Wahlström, U.⁴ Shimizu, T.⁵ Mclntyre, D.⁶ Greene, J.E.⁷ Sundgren, J.-E.⁸

13
- 13944274472
- (1990) J. Appl. Phys. , vol.67 , pp. 1542
- McIntyre, D.¹ Green, J.E.² Hakansson, G.³ Sundgren, J.E.⁴ Münz, W.D.⁵

14
- 0027589851
- (1993) J. Mater. Res. , vol.8 , pp. 1093
- Ichimura, H.¹ Kawana, A.²

15
- 0031139865
- (1997) Thin Solid Films , vol.300 , pp. 171
- Inoue, S.¹ Uchida, H.² Yoshinaga, Y.³ Koterazawa, K.⁴

16
- 0024140714
- (1988) Surf. Coat. Technol. , vol.36 , pp. 151
- Holleck, H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.