Electrical activtty of extended defects and getteiing of metallic impurities in silicon

Materials Science and Technology

Volumn 11, Issue 7, 1995, Pages 685-690

  Kusanagi, S ^a   Sekiguchi, T ^a   Shen, B ^a   Sumino, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DISLOCATIONS (CRYSTALS); ELECTRON BEAMS; HETEROJUNCTIONS; IMPURITIES; METALS; TEMPERATURE DISTRIBUTION;

ELECTRICAL ACTIVITIES; ELECTRON-BEAM-INDUCED CURRENT; ELECTRON-BEAM-INDUCED CURRENT TECHNIQUES; METALLIC IMPURITY; RECOMBINATION ACTIVITY; RECOMBINATION CENTRES; TEMPERATURE DEPENDENCE; TEMPERATURE DEPENDENT;

CRYSTAL IMPURITIES;

EID: 0000909291     PISSN: 02670836     EISSN: 17432847     Source Type: Journal    
DOI: 10.1080/17432847.1995.11945564     Document Type: Article

References (31)

1. H. J. LEAMY: J. Appl. Phys., 1982, 53, R51-R80.
2. H. ALEXANDER, S. DIETRICH, M. HUHNE, M. KOLBE, and G. WEBER: Phys. Status Solidi (a), 1990, 117, 417-428.
3. Z. J. RADZIMSKI, T. Q. ZHOU, A. BUCZKOWSKI, G. A. ROZGONYI, D. FLINN, L. G. HELLWIG, and J. A. ROSS: Appl. Phys. Lett., 1992, 60, 1096-0098.
4. V. HIGGS, C. E. NORMAN, E. C. LIGHTOWLERS, and P. KIGHTLEY: Inst. Phys. Conf. Ser., 1991, 117, 737-742.
5. P. R. WILSHAW, T. S. FELL, and M. D. COTEAU: J. Phys. (France) IV, 1991, 1-C6, 3-14.
6. Z. J. RADZIMSKI, A. BUCZKOWSKI, and G. A. ROZGONYI: Solid State Phenom., 1993, 32-33, 309-318.
7. W. SHOCKLEY and W. T. READ, JR: Phys. Rev., 1952, 87, 835-842.
8. R. N. HALL: Phys. Rev., 1952, 87, 387.
9. W. T. READ: Philos. Mag., 1954, 45, 775-796.
10. J. R. CHELIKOWSKY: Phys. Rev. Lett., 1982, 49, 1569-1572.
11. H. VETH and H. TEICHLER: Philos. Mag. B, 1984, 49, 371-384.
12. K. W. LODGE, A. LAPICCIRELLA, C. BATTISTONI, N. TOMASSINI, and S. L. ALTMANN: Philos. Mag. A, 1989, 60, 643-651.
13. S. MARKLUND: Phys. Status Solidi (b), 1980, 92, 83=89.
14. R. SAUER, C. KISIELOWSKI-KEMMERICH, and H. ALEXANDER: Phys. Rev. Lett., 1986, 57, 1472-4475..
15. YU. S. LELIKOV, YU. T. REBANE, and YU. G. SHRETER: Inst. Phys. Conf. Ser., 1989, 104, 119-129.
16. A. V. BAZHENOV and L. L. KRASIL'NIKOVA: Sov. Phys. Solid State, 1986, 28, 128-331.
17. M. BROHL and H. ALEXANDER: Inst. Phys. Conf. Ser., 1989, 104, 163-168.
18. S. WINTER: Phys. Status Solidi (b), 1978, 90, 289-293.
19. A. CLAESSON: J. Phys. (Orsay), 1979, 40-C6, 39-41.
20. H. TEICHLER: J. Phys. (Orsay), 1979, 40-C6, 43-45.
21. J. R. PATEL and L. C. KIMERLING: J. Phys. (Orsay), 1979, 40-C6, 67-70.
22. W. SZKIELKO, O. BREITENSTEIN, and R. PICKENHEIN: Cryst. Res. Technol, 1981, 16, 197-202.
23. E. R. WEBER and H. ALEXANDER: J. Phys. (Orsay), 1983, 44-C4, 319-328.
24. P. OMLING, E. R. WEBER, L. MONTELIUS, H. ALEXANDER, and J. MICHEL: Phys. Rev. B, 1985, 32, 6571-6581.
25. V. V. KVEDER, YU. A. OSIPYAN, W. SCHROETER, and G. ZOTH: Phys. Status Solidi (a), 1982, 72, 701-713.
26. L. C. KIMERLING and J. R. PATEL: Appl. Phys. Lett., 1979, 34, 73-75.
27. H. ONO and K. SUMINO: J. Appl. Phys., 1985, 57, 287-293.
28. S. KUSANAGI, T. SEKIGUCHI, and K. SUMINO: Appl. Phys. Lett., 1992, 61, 792-794.
29. B. SHEN, T. SEKIGUCHI, J. JABLONSKI, and K. SUMINO: J. App. Phys., 1994, 76, 4540-4546.
30. E. NES and J. WASHBURN: J. Appl. Phys., 1971, 42, 3562-3574.
31. J. K. SOLBERG: Acta Crystallogr. A, 1978, 34, 684-698.