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Volumn 82-84, Issue , 2002, Pages 213-218

Electrical effects of point defect clouds at dislocations in silicon, studied by deep level transient spectroscopy

Author keywords

Dislocations; DLTS; Electrical properties; Point defect clouds; Silicon

Indexed keywords

ANNEALING; DEEP LEVEL TRANSIENT SPECTROSCOPY; DISLOCATIONS (CRYSTALS); ELECTRIC FIELD EFFECTS; ELECTRIC PROPERTIES; ELECTROMAGNETIC FIELD EFFECTS; LOW TEMPERATURE EFFECTS; POINT DEFECTS;

EID: 0036131296     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (12)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.