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Volumn 82-84, Issue , 2002, Pages 213-218
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Electrical effects of point defect clouds at dislocations in silicon, studied by deep level transient spectroscopy
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Author keywords
Dislocations; DLTS; Electrical properties; Point defect clouds; Silicon
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Indexed keywords
ANNEALING;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DISLOCATIONS (CRYSTALS);
ELECTRIC FIELD EFFECTS;
ELECTRIC PROPERTIES;
ELECTROMAGNETIC FIELD EFFECTS;
LOW TEMPERATURE EFFECTS;
POINT DEFECTS;
LOW TEMPERATURE TAILS;
POINT DEFECT CLOUDS;
SYMMETRICAL BROADENING;
SEMICONDUCTING SILICON;
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EID: 0036131296
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (12)
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References (18)
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