Optical emission spectroscopic studies of ICP Ar plasma

Plasma Science and Technology

Volumn 9, Issue 5, 2007, Pages 578-581

  Qi, Xuelian ^a   Ren, Chunsheng ^a   Zhang, Jian ^a   Ma, Tengcai ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Ar; Inductively coupled plasma; Optical emission spectroscopy; Spectral line intensity

Indexed keywords

ARGON; ELECTRIC DISCHARGES; HYSTERESIS; OPTICAL EMISSION SPECTROSCOPY;

DISCHARGE CHAMBERS; SPECTRAL LINE INTENSITY; WORKING GAS PRESSURE;

INDUCTIVELY COUPLED PLASMA;

EID: 38549165358     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/9/5/13     Document Type: Article

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