Optical emission kinetics of argon inductively coupled plasma and argon dielectric barrier discharge

Vacuum

Volumn 65, Issue 3-4, 2002, Pages 327-333

  Zhang, J L ^a   Yu, S J ^a   Ma, T C ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Dielectric barrier discharge; Inductively coupling plasma; Optical emission kinetics; Optical emission spectroscopy

Indexed keywords

ARGON; DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; LIGHT EMISSION; REACTION KINETICS;

DIELECTRIC BARRIER DISCHARGES; OPTICAL EMISSION SPECTROSCOPY;

INDUCTIVELY COUPLED PLASMA;

EID: 0037182048     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00438-9     Document Type: Conference Paper

References (13)