SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 11-12, 2004, Pages 1993-1996

Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursors

(6) Anita, V a,b Butuda, T b Maeda, T c Takizawa, K c Saito, N b Takai, O b

a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI (Romania)

b NAGOYA UNIVERSITY (Japan)

c Ecol and Ener Syst Devmt Center (Japan)

Author keywords

Diamond like carbon thin films; Different precursors; Mechanical and electrical properties; Plasma enhanced chemical vapor deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CORROSION; DOPING (ADDITIVES); FOURIER TRANSFORMS; INFRARED RADIATION; IONIZATION; METHANE; NITROGEN; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

DIFFERENT PRECURSORS; MECHANICAL AND ELECTRICAL PROPERTIES; NITROGEN GAS;

DIAMOND LIKE CARBON FILMS;

EID: 7544234582 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.05.002 Document Type: Conference Paper

Times cited : (16)

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