General characteristics of the Thermoionic Vacuum Arc plasma

Journal of Optoelectronics and Advanced Materials

Volumn 9, Issue 9, 2007, Pages 2932-2934

  Surdu Bob, C ^a   Mustata, I ^a   Iacob, C ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Deposition; Plasma; Thin films; TVA

Indexed keywords

DEPOSITION; PLASMAS; THERMIONIC POWER GENERATION; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

ANODIC ARC PLASMA; DEPOSITION METHODS; THERMIONIC VACUUM ARC; THIN-FILM DEPOSITIONS; VACUUM ARC PLASMA;

THIN FILMS;

EID: 38549118543     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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