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Volumn 13, Issue 4-8, 2004, Pages 1398-1401
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Diamond-like nanostructured carbon film deposition using thermionic vacuum arc
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Author keywords
Diamond like carbon; High resolution electron microscopy; Ion bombardment; Nanostructures
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Indexed keywords
DEPOSITION;
ION EXCHANGE;
NANOSTRUCTURED MATERIALS;
THIN FILMS;
VACUUM;
CARBON FILM DEPOSITION;
THERMIONIC VACUUM ARC (TVA);
VAPOR PLASMA;
DIAMONDS;
DIAMOND;
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EID: 2442473992
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2003.10.048 Document Type: Article |
Times cited : (57)
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References (20)
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