Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 757-761

  Biloiu, Costel ^a   Ehrich, Horst ^b   Musa, Geavit ^c  

^a UNIVERSITY OF BUCHAREST   (Romania)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

^c Plasma and Radiation   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELECTRON ENERGY LEVELS; IN SITU PROCESSING; SPECTROSCOPIC ANALYSIS; THERMIONIC EMISSION; THIN FILMS; TITANIUM;

ELECTRON TEMPERATURE; THERMIONIC VACUUM ARC (TVA);

PLASMA APPLICATIONS;

EID: 0035334540     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1368839     Document Type: Article

References (11)