GaN MSM photodetectors with TiW transparent electrodes

Materials Science and Engineering: B

Volumn 112, Issue 1, 2004, Pages 25-29

  Wang, C K ^a   Chang, S J ^a   Su, Y K ^a   Chang, C S ^a   Chiou, Y Z ^b   Kuo, C H ^a   Lin, T K ^a   Ko, T K ^a   Tang, J J ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

GaN; ITO; MSM; Photodetectors; TiN; TiW; UV

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; EPITAXIAL GROWTH; FILMS; MAGNETRON SPUTTERING; PHOTODETECTORS; SEMICONDUCTOR DEVICES; SUBSTRATES; TITANIUM COMPOUNDS; TUNGSTEN COMPOUNDS; ULTRAVIOLET RADIATION;

DARK CURRENT CONTRAST RATIO; ITO; MSM; SILICON PHOTODIODES;

GALLIUM NITRIDE;

EID: 3843076292     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2004.05.002     Document Type: Article

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