Macroporous silicon: A versatile material for 3D structure fabrication

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 662-669

  Trifonov, T ^a,b   Rodriguez A ^a   Marsal, L F ^b   Pallares J ^b   Alcubilla, R ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

Electrochemical etching; Macroporous silicon; Photonic crystals; Silicon micromachining; Three dimensional structures

Indexed keywords

ELECTROCHEMICAL ETCHING; MICROMACHINING; MICROSTRUCTURE; PHOTONIC CRYSTALS;

MACROPOROUS SILICON; SILICON MICROMACHINING;

SILICON;

EID: 38349056394     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.001     Document Type: Article

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