Fabrication of two- and three-dimensional photonic crystals by electrochemical etching of silicon

Physica Status Solidi C: Conferences

Volumn 2, Issue 8, 2005, Pages 3104-3107

  Trifonov, T ^a   Marsal, L F ^a   Rodriguez A ^b   Pallares J ^a   Alcubilla, R ^b  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROCHEMISTRY; ETCHING; PHOTONS; SILICON;

ASPECT-RATIO PILLARS; ELECTROCHEMICAL ETCHING; MACROPORE ARRAYS; PHOTONIC CRYSTALS;

CRYSTALS;

EID: 27344446163     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200460743     Document Type: Conference Paper

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