Trends in fabrication and applications of macroporous silicon

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 1, 2003, Pages 13-15

  Lehmann, Volker ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; CALCULATIONS; CHEMICAL VAPOR DEPOSITION; DIFFRACTION; ELECTROCHEMISTRY; MOLECULES; OPTICAL FILTERS; OPTICAL PROPERTIES; POROSITY; SILICON WAFERS;

BIOLOGICAL MOLECULE; FLUIDIC PROPERTY; MACROPORE ARRAY; MACROPOROUS SILICON;

POROUS SILICON;

EID: 0038377272     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306513     Document Type: Conference Paper

References (4)

1. M. Born and E. Wolf, Principles of Optics (Pergamon Press, New York, 1975).
2. V. Lehmann, J. Electrochem. Soc. 140, 2836, (1993).
3. V. Lehmann, R. Stengl, H. Reisinger, R. Detemple, and W. Theiss, Appl. Phys. Lett. 78, 589, (2001).
4. A. Steel, M. Torres, J. Hartwell, Y.-Y.-Yung, N. Ting, G. Hoke, and H. Yang, Chapter 5 in: Microarray Biochip Technol. (edited by Schena, Bio Techniques Books, Nattick, MA, USA, 2000).