Multi-physics system modeling of a pneumatic micro actuator

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 489-498

  Rodríguez, Gustavo A Ardila ^a   Rossi, Carole ^a   Zhang, Kaili ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Elastic polymer; MEMS; Multi physics modeling; Pneumatic actuator

Indexed keywords

ATMOSPHERIC PRESSURE; DIELECTRIC DEVICES; ELASTICITY; HEAT RESISTANCE; HEATING; MATHEMATICAL MODELS; PNEUMATICS;

DIELECTRIC MEMBRANES; ELASTIC POLYMERS; MULTI PHYSICS MODELING; PNEUMATIC ACTUATORS;

MICROACTUATORS;

EID: 38149088681     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.005     Document Type: Article

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