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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 140-145

Synthesis and characteristics of new quaternary Ti-Mo-Si-N coatings by a hybrid coating system

(4) Jeon, Jin Woo a Hong, Seung Gyun a Kim, Kwang Ryul a Kim, Kwang Ho a

a Pusan National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS VOLTAGE; CRYSTALLITES; GRAIN REFINEMENT; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; NANOCOMPOSITES; SOLID SOLUTIONS; SUBSTITUTION REACTIONS; SUBSTRATES; TITANIUM;

COATING SYSTEM; SUBSTRATE BIAS VOLTAGE;

COATINGS;

EID: 37849042913 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.2821730 Document Type: Article

Times cited : (7)

References (34)

1
- 0030412495
- SCTEEJ 0257-8972.
- C. Wiemer, R. Sanjines, and F. Levy, Surf. Coat. Technol. SCTEEJ 0257-8972 86-87, 372 (1996).
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 372
- Wiemer, C.¹ Sanjines, R.² Levy, F.³

2
- 28844435163
- WEARCJ 0043-1648 (in press).
- Q. Yang, L. R. Zhao, P. C. Patnaik, and X. T. Zeng, Wear WEARCJ 0043-1648 (in press).
- Wear
- Yang, Q.¹ Zhao, L.R.² Patnaik, P.C.³ Zeng, X.T.⁴

3
- 0035387368
- SCTEEJ 0257-8972.
- F. Regent and J. Musil, Surf. Coat. Technol. SCTEEJ 0257-8972 142-144, 146 (2001).
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 146
- Regent, F.¹ Musil, J.²

4
- 0030416072
- THSFAP 0040-6090.
- R. Sanjines, C. Wiemer, J. Almeida, and F. Levy, Thin Solid Films THSFAP 0040-6090 290-291, 334 (1996).
- (1996) Thin Solid Films , vol.290-291 , pp. 334
- Sanjines, R.¹ Wiemer, C.² Almeida, J.³ Levy, F.⁴

5
- 0040610698
- SCTEEJ 0257-8972.
- M. Diserens, J. Patscheider, and F. Levy, Surf. Coat. Technol. SCTEEJ 0257-8972 108-109, 241 (1998).
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 241
- Diserens, M.¹ Patscheider, J.² Levy, F.³

6
- 36449001310
- APPLAB 0003-6951 10.1063/1.113110.
- S. Veprek, S. Reiprich, and L. Shizhi, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.113110 66, 2640 (1999).
- (1999) Appl. Phys. Lett. , vol.66 , pp. 2640
- Veprek, S.¹ Reiprich, S.² Shizhi, L.³

7
- 0034499661
- SCTEEJ 0257-8972.
- F. Vaz, L. Rebouta, P. Goudeau, J. Pacaus, H. Garem, J. Riviere, A. Cavaleiro, and E. Alves, Surf. Coat. Technol. SCTEEJ 0257-8972 133-134, 307 (2000).
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 307
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³ Pacaus, J.⁴ Garem, H.⁵ Riviere, J.⁶ Cavaleiro, A.⁷ Alves, E.⁸

8
- 0030483837
- SCTEEJ 0257-8972.
- S. Veprek, M. Haussmann, S. Reiprich, Li Shizhi, and J. Dian, Surf. Coat. Technol. SCTEEJ 0257-8972 86-87, 394 (1996).
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 394
- Veprek, S.¹ Haussmann, M.² Reiprich, S.³ Shizhi, L.⁴ Dian, J.⁵

9
- 0034310611
- SCTEEJ 0257-8972.
- S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Männling, P. Nesladek, G. Dollinger, and A. Bergmaien, Surf. Coat. Technol. SCTEEJ 0257-8972 133-134, 152 (2000).
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 152
- Veprek, S.¹ Niederhofer, A.² Moto, K.³ Bolom, T.⁴ Männling, H.-D.⁵ Nesladek, P.⁶ Dollinger, G.⁷ Bergmaien, A.⁸

10
- 17444451442
- WEARCJ 0043-1648.
- J. L. He, C. K. Chen, and M. H. Hon, Wear WEARCJ 0043-1648 181-183, 189 (1995).
- (1995) Wear , vol.181-183 , pp. 189
- He, J.L.¹ Chen, C.K.² Hon, M.H.³

11
- 0033503577
- SCTEEJ 0257-8972.
- M. Diserens, J. Patscheider, and F. Levy, Surf. Coat. Technol. SCTEEJ 0257-8972 120-121, 158 (1999).
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 158
- Diserens, M.¹ Patscheider, J.² Levy, F.³

12
- 0033438070
- JVTAD6 0734-2101 10.1116/1.581977.
- S. Veprek, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.581977 17, 2401 (1999).
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 2401
- Veprek, S.¹

13
- 0038832585
- SCTEEJ 0257-8972.
- F. Vaz, L. Rebouta, S. Ramos, M. F. da Silva, and J. C. Soares, Surf. Coat. Technol. SCTEEJ 0257-8972 108-109, 236 (1998).
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 236
- Vaz, F.¹ Rebouta, L.² Ramos, S.³ Da Silva, M.F.⁴ Soares, J.C.⁵

14
- 0037010580
- SCTEEJ 0257-8972 10.1016/S0257-8972(02)00499-1.
- K. H. Kim, S.-R. Choi, and S.-Y. Yoon, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(02)00499-1 298, 243 (2002).
- (2002) Surf. Coat. Technol. , vol.298 , pp. 243
- Kim, K.H.¹ Choi, S.-R.² Yoon, S.-Y.³

15
- 33846496074
- SCTEEJ 0257-8972.
- M. Egawa, K. Miura, M. Yokoi, and I. Ishigami, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 4873 (2007).
- (2007) Surf. Coat. Technol. , vol.201 , pp. 4873
- Egawa, M.¹ Miura, K.² Yokoi, M.³ Ishigami, I.⁴

16
- 4444234832
- MLETDJ 0167-577X.
- Y. S. Zoua, W. Wang, G. H. Song, H. Du, J. Gong, R. F. Huang, and L. S. Wen, Mater. Lett. MLETDJ 0167-577X 58, 3271 (2004).
- (2004) Mater. Lett. , vol.58 , pp. 3271
- Zoua, Y.S.¹ Wang, W.² Song, G.H.³ Du, H.⁴ Gong, J.⁵ Huang, R.F.⁶ Wen, L.S.⁷

17
- 28944445032
- SCTEEJ 0257-8972.
- J. T. Chang, C. H. Yeh, J. L. He, K. C. Chen, A. Matthews, and A. Leyland, Surf. Coat. Technol. SCTEEJ 0257-8972 200, 1401 (2005).
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1401
- Chang, J.T.¹ Yeh, C.H.² He, J.L.³ Chen, K.C.⁴ Matthews, A.⁵ Leyland, A.⁶

18
- 37849021901
- MCHPDR 0254-0584.
- P. Mohan Babu, G. Venkata Rao, and S. Uthanna, Mater. Chem. Phys. MCHPDR 0254-0584 78, 208 (2002).
- (2002) Mater. Chem. Phys. , vol.78 , pp. 208
- Mohan Babu, P.¹ Venkata Rao, G.² Uthanna, S.³

19
- 0001559427
- JRNBAG 0160-1741.
- S. A. Brenner and S. Senderoff, J. Res. Natl. Bur. Stand. JRNBAG 0160-1741 42, 105 (1949).
- (1949) J. Res. Natl. Bur. Stand. , vol.42 , pp. 105
- Brenner, S.A.¹ Senderoff, S.²

20
- 0031347180
- SCTEEJ 0257-8972 10.1016/S0257-8972(97)00279-X.
- S. Veprek, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(97) 00279-X 97, 15 (1997).
- (1997) Surf. Coat. Technol. , vol.97 , pp. 15
- Veprek, S.¹

21
- 0035465699
- SCTEEJ 0257-8972.
- J. Patscheider, T. Zehnder, and M. Diserens, Surf. Coat. Technol. SCTEEJ 0257-8972 146-147, 201 (2001).
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 201
- Patscheider, J.¹ Zehnder, T.² Diserens, M.³

22
- 0037472622
- SCTEEJ 0257-8972.
- W. J. Meng, X. D. Zhang, B. Shi, J. C. Jiang, L. E. Rehn, P. M. Baldo, and R. C. Tittsworth, Surf. Coat. Technol. SCTEEJ 0257-8972 163-164, 251 (2003).
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 251
- Meng, W.J.¹ Zhang, X.D.² Shi, B.³ Jiang, J.C.⁴ Rehn, L.E.⁵ Baldo, P.M.⁶ Tittsworth, R.C.⁷

23
- 37849024135
- THSFAP 0040-6090.
- I.-W. Park, S. R. Choi, J. H. Suh, C.-G. Park, and K. H. Kim, Thin Solid Films THSFAP 0040-6090 447-448, 415 (2004).
- (2004) Thin Solid Films , vol.447-448 , pp. 415
- Park, I.-W.¹ Choi, S.R.² Suh, J.H.³ Park, C.-G.⁴ Kim, K.H.⁵

24
- 37849054395
- Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, Eden Prairie, MN),.
- J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, Eden Prairie, MN, 1995), p. 238.
- (1995) , pp. 238
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

25
- 0043194291
- MSAPE3 0921-5093 10.1016/S0921-5093(03)00336-8.
- Y. G. Shen, Mater. Sci. Eng., A MSAPE3 0921-5093 10.1016/S0921-5093(03) 00336-8 359, 158 (2003).
- (2003) Mater. Sci. Eng., A , vol.359 , pp. 158
- Shen, Y.G.¹

26
- 37849050752
- Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, Eden Prairie, MN),.
- J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, Eden Prairie, MN, 1995), p. 226.
- (1995) , pp. 226
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

27
- 0029407730
- THSFAP 0040-6090 10.1016/0040-6090(95)06695-0.
- S. Veprek and S. Reiprich, Thin Solid Films THSFAP 0040-6090 10.1016/0040-6090(95)06695-0 268, 64 (1995).
- (1995) Thin Solid Films , vol.268 , pp. 64
- Veprek, S.¹ Reiprich, S.²

28
- 0037011109
- THSFAP 0040-6090.
- S. H. Kim, J. K. Kim, and K. H. Kim, Thin Solid Films THSFAP 0040-6090 420-421, 360 (2002).
- (2002) Thin Solid Films , vol.420-421 , pp. 360
- Kim, S.H.¹ Kim, J.K.² Kim, K.H.³

29
- 0032077749
- JECSER 0955-2219.
- J. Tagadoum, H. Houmid-Bennani, and D. Mairey, J. Eur. Ceram. Soc. JECSER 0955-2219 18, 553 (1998).
- (1998) J. Eur. Ceram. Soc. , vol.18 , pp. 553
- Tagadoum, J.¹ Houmid-Bennani, H.² Mairey, D.³

30
- 1342332670
- SCTEEJ 0257-8972.
- O.-N. Park, J. H. Park, S.-Y. Yoon, M.-H. Lee, and K. H. Kim, Surf. Coat. Technol. SCTEEJ 0257-8972 179, 83 (2004).
- (2004) Surf. Coat. Technol. , vol.179 , pp. 83
- Park, O.-N.¹ Park, J.H.² Yoon, S.-Y.³ Lee, M.-H.⁴ Kim, K.H.⁵

31
- 0034303926
- WEARCJ 0043-1648.
- S. Wilson and A. T. Alpas, Wear WEARCJ 0043-1648 245, 223 (1996).
- (1996) Wear , vol.245 , pp. 223
- Wilson, S.¹ Alpas, A.T.²

32
- 1342305084
- THSFAP 0040-6090.
- S. R. Choi, I.-W. Park, S. H. Kim, and K. H. Kim, Thin Solid Films THSFAP 0040-6090 447-448, 371 (2004).
- (2004) Thin Solid Films , vol.447-448 , pp. 371
- Choi, S.R.¹ Park, I.-W.² Kim, S.H.³ Kim, K.H.⁴

33
- 0036464348
- MACHEX 1044-5803 10.1016/S1044-5803(02)00256-5.
- C. A. Carrasco, V. Vergara, S. R. Benavente, G. N. Mingolo, and J. C. Rios, Mater. Charact. MACHEX 1044-5803 10.1016/S1044-5803(02)00256-5 48, 81 (2002).
- (2002) Mater. Charact. , vol.48 , pp. 81
- Carrasco, C.A.¹ Vergara, V.² Benavente, S.R.³ Mingolo, G.N.⁴ Rios, J.C.⁵

34
- 0024946054
- SCTEEJ 0257-8972.
- O. Knotek, M. Atzor, and F. Jungblit, Surf. Coat. Technol. SCTEEJ 0257-8972 39-40, 445 (1989).
- (1989) Surf. Coat. Technol. , vol.39-40 , pp. 445
- Knotek, O.¹ Atzor, M.² Jungblit, F.³

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