Effects of substrate bias voltage on projection growth in chromium nitride films deposited by arc ion plating

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 4873-4878

  Egawa, Motoo ^a   Miura, Ken'ichi ^a   Yokoi, Masayuki ^a   Ishigami, Itsuo ^a  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

Arc ion plating; Chromium nitride; Droplet; Projection; Surface roughness

Indexed keywords

DEPOSITION; FILM GROWTH; MORPHOLOGY; SURFACE ROUGHNESS;

ARC ION PLATING; CHROMIUM NITRIDE FILMS;

CHROMIUM COMPOUNDS;

CHROMIUM COMPOUNDS; DEPOSITION; FILM GROWTH; MORPHOLOGY; SURFACE ROUGHNESS;

EID: 33846496074     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.076     Document Type: Article

References (15)

1. Tai C.N., Koh E.S., and Akari K. Surf. Coat. Technol. 43/44 (1990) 324
2. Ljungcrantz H., Hultman L., Sundgren J.-E., Håkansson G., and Karlsson L. Surf. Coat. Technol. 63 (1994) 123
3. Utsumi T., and English J.H. J. Appl. Phys. 46 (1975) 126
4. Randhawa H. J. Vac. Sci. Technol., A 4 (1986) 2755
5. Ertürk E., Heuvel H.-J., and Dederichs H.-G. Surf. Coat. Technol. 39/40 (1989) 455
6. Vyskočil J., and Musil J. Surf. Coat. Technol. 43/44 (1990) 299
7. Sathrum P., and Coll B.F. Surf. Coat. Technol. 50 (1992) 103
8. Manova D., Huber P., Mändl S., and Rauschenbach B. Surf. Coat. Technol. 142-144 (2001) 61
9. Odén M., Ericsson C., Håkansson G., and Ljungcrantz H. Surf. Coat. Technol. 114 (1999) 39
10. Shiao M.-H., and Shieu F.-S. J. Vac. Sci. Technol., A 19 (2001) 703
11. Egawa M., Miura K., Yokoi M., and Ishigami I. J. Surf. Finish. Soc. Jpn. 57 (2006) 283
12. Gruss K.A., Zheleva T., Davis R.F., and Watkins T.R. Surf. Coat. Technol. 107 (1998) 115
13. Bland R.D., Kominiak G.J., and Mattox D.M. J. Vac. Sci. Technol. 11 (1974) 671
14. Homma Y., and Tsunekawa S. J. Electrochem. Soc. 132 (1985) 1466
15. Johansson B.O., Sundgren J.-E., Hentzell H.T.G., and Karlsson S.-E. Thin Solid Films 111 (1984) 313