Large-area and high-density silicon nanocone arrays by Ar+ sputtering at room temperature

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 1, 2008, Pages 197-202

  Li, Qintao ^a,b   Ni, Zhichun ^a,b   Yang, Shumin ^a,b   Gong, Jinlong ^a   Zhu, Dezhang ^a   Zhu, Zhiyuan ^a  

^a SHANGHAI INSTITUTE OF APPLIED PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Carbon nanocones; Off normal incident ion beam; Silicon nanocones; Sputtering

Indexed keywords

ARRAY PROCESSING; SCANNING ELECTRON MICROSCOPY; SPUTTERING;

CARBON NANOCONES; OFF-NORMAL INCIDENT ION BEAM; SILICON NANOCONES;

NANOSTRUCTURED MATERIALS;

EID: 37549014955     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.10.029     Document Type: Article

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