Status and challenges of template fabrication process for UV nanoimprint lithography

Journal of Photopolymer Science and Technology

Volumn 20, Issue 4, 2007, Pages 563-567

  Kurihara, Masaaki ^a  

^a DAI NIPPON PRINTING CO LTD   (Japan)

Author keywords

3D structural templates; Anti sticking layer; Semiconductor; Template; UV nano imprint

Indexed keywords

EID: 37549006713     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.563     Document Type: Article

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