Luminescence of intrinsic and extrinsic defects in hafnium oxide films

Physical Review B - Condensed Matter and Materials Physics

Volumn 76, Issue 23, 2007, Pages

  Rastorguev, A A ^a   Belyi, V I ^a   Smirnova, T P ^a   Yakovkina, L V ^a   Zamoryanskaya, M V ^b   Gritsenko, V A ^c   Wong, Hei ^d  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

^b IOFFE INSTITUTE   (Russian Federation)

^c INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^d CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 37349125925     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.76.235315     Document Type: Article

References (49)

1. H. R. Huff, A. Hou, C. Lim, Y. Kim, J. Barnett, G. Bersuker, G. A. Brown, C. D. Young, P. M. Zeitzoft, and J. Gutt, Microelectron. Eng. MIENEF 0167-9317 10.1016/S0167-9317(03)00292-2 69, 152 (2003).
2. H. Wong and H. Iwai, Microelectron. Eng. MIENEF 0167-9317 10.1016/j.mee.2006.01.271 83, 1867 (2006).
3. K. Kukli, P. Pilvi, M. Ritala, T. Sajavaara, J. Lu, and M. Leskela, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2005.05.050 491, 328 (2005).
4. HIKE Project Research Report No. IST-2000-29295 (unpublished), http://www.nmrc.ie/hike/hike_final.pdf
5. M. M. Frank, S. Sayan, S. Dormann, T. J. Emge, L. S. Wielunski, E. Garfunkel, and Y. J. Chabal, Mater. Sci. Eng., B MSBTEK 0921-5107 109, 6 (2004).
6. D. A. Neumaer and E. Cartier, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1382851 90, 1801 (2001).
7. V. A. Viljchuk, P. D. Alekseev, and Yu. A. Stenjkin, http://www.omsu. omskreg.ru/vestnik/articles/y1998-i1/a029/article
8. M. Houssa, G. Poutois, M. M. Heyns, and A. Stesmans, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/17/21/004 17, S2075 (2005).
9. J. Aarik, H. Mänder, and M. Kirm, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2004.01.110 466, 41 (2004).
10. M. Kirm, J. Aarik, M. Jürgens, and I. Sildon, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/j.nima.2004.08.020 537, 251 (2005).
11. T. Ito, M. Maeda, K. Nakamura, H. Kato, and Y. Ohiki, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1856220 97, 054104 (2005).
12. T. Ito, H. Kato, and Y. Ohiki, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2199977 99, 094106 (2006).
13. L. P. Borilo, thesis, Tomsk, 2003, http://sun.tsu.ru/mminfo/0197-72960/ 019772960.pdf
14. J. Calvert and J. N. Pitts, Photochemistry (Wiley, New York, 1968).
15. V. I. Krasovskij, Usp. Fiz. Nauk UFNAAG 0042-1294 175, 469 (1954).
16. G. Herzberg, Spectra and Structures of Simple Free Radicals (Cornel University Press, London, 1974).
17. I. A. Taub and K. Eiben, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1670446 49, 2499 (1968).
18. T. I. Quickenden, S. M. Trotman, and D. F. Sangster, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.444352 77, 3790 (1982).
19. R. Toegel, S. Hilgenfeldt, and D. Lohse, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.88.034301 88, 034301 (2002).
20. V. P. Kazakov and G. L. Sharipov, Radioluminescence of the Water Solutions (Nauka, Moskow, 1986).
21. L. V. Belovolova, M. V. Glushkov, and G. I. Vinogradov (http://zhurnal.ape.relarn.ru/articles/2006/268.pdf).
22. M. A. Margulis, Usp. Fiz. Nauk UFNAAG 0042-1294 170, 263 (2000).
23. Y. T. Didenko and T. V. Gordeychuk, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.84.5640 84, 5640 (2000).
24. Y. T. Didenko, T. V. Gordeychuk, and V. L. Korretz, J. Sound Vib. JSVIAG 0022-460X 10.1016/0022-460X(91)90489-7 147, 409 (1991).
25. Y. T. Didenko and S. P. Pugah, J. Phys. Chem. JPCHAX 0022-3654 10.1021/j100090a006 98, 9742 (1994).
26. B. P. Barber, Phys. Rep. PRPLCM 0370-1573 10.1016/S0370-1573(96)00050-6 281, 65 (1997).
27. T. V. Gordejchuk, http://zhurnal.ape.relarn.ru/articles/2002/131.pdf
28. O. Baghdassarian, H. C. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.86.4934 86, 4934 (2001).
29. Yu. A. Vladimirov and A. Ya. Potapenko, Physical-Chemical Foundations of Photobiology Production (Vysshaya Shkola, Moscow, 1989).
30. A. Ya. Vul, C. V. Kidalov, V. M. Milenin, N. A. Timofeev, and M. A. Hodorkovskiy, J. Tech. Phys. JTPHDR 0324-8313 10.1134/1.1262363 25, 10 (1999).
31. L. V. Yakovkina, V. N. Kichai, T. P. Smirnova, Yu. V. Shubin, N. B. Morozova, K. V. Zherikova, and I. K. Igumenov, Inorg. Mater. INOMAF 0020-1685 10.1007/s10789-005-0305-8 41, 1300 (2005).
32. A. M. Sorokin, V. V. Kaichev, A. I. Timoshin, O. V. Moskovkin, A. A. Rastorguev, and A. M. Badalyan, Instrum. Exp. Tech. INETAK 0020-4412 10.1023/A:1017588810367 44, 375 (2001).
33. A. N. Botoev, E. Yu Livova, and M. V. Fok, Proceeding of the Lebedev Physical Institute of RAS, 1985 (unpublished), Vol. 164, p. 128.
34. Z. L. Morgenshtern, V. B. Neustroev, and M. I. Epshtein, J. Appl. Spectrosc. JASYAP 0021-9037 3, 49 (1965).
35. M. V. Zamoryanskaya, S. G. Konnikov, and A. N. Zamoryanskii, Instrum. Exp. Tech. INETAK 0020-4412 47, 447 (2004).
36. M. I. Klinger, Ch. B. Luchik, and T. V. Mashovez, Usp. Fiz. Nauk UFNAAG 0042-1294 147, 524 (1985).
37. Ch. B. Luchik and A. Ch. Luchik, The Decay of Electron Excitation with Formation of the Defects in Solid (Nauka, Moscow, 1989).
38. V. A. Pustovarov, V. Yu. Ivanov, M. Kirm, A. V. Kruzhalov, A. V. Korotaev, and G. Zimmerer, Phys. Solid State PSOSED 1063-7834 43, 1189 (2001).
39. I. P. Syzdalev, Nanotechnology: Physical-Chemistry of Nanoclasters Nanostructures and Nanomaterials (Synergy from Past to Future) (KomKniga, Moscow, 2006).
40. Yu. D. Tretjyakov, Usp. Khim. USKHAB 0042-1308 72, 731 (2003).
41. Y. B. Zheng, S. J. Wang, and C. H. A. Huan, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2005.09.124 504, 197 (2006).
42. T. Ito, M. Maeda, K. Nakamura, H. Kato, and Y. Ohki, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1856220 97, 054104 (2005).
43. Y. Kang, P. M. Lenahan, and J. F. Conley, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1621078 83, 3407 (2003).
44. A. S. Foster, V. B. Sulimov, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.64.224108 64, 224108 (2001).
45. A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.65.174117 65, 174117 (2002).
46. T. V. Perevalov, V. A. Gritsenko, S. B. Erenburg, and H. Wong, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2464184 101, 053704 (2007).
47. A. A. Radzig and B. M. Smirnov, Reference Book on Atomic and Molecular Physics (Atomizdat, Moscow, 1980).
48. H. Nishikawa, T. Shiroyama, R. Nakamura, Y. Ohki, K. Nagasawa, and Y. Hama, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.45.586 45, 586 (1992).
49. L. A. Bakalejnikova, M. V. Zamoryanskaya, E. V. Kolesnikova, V. I. Sokolov, and E. Yu. Flegontova, Phys. Solid State PSOSED 1063-7834 10.1134/1.1767231 46, 989 (2004).