Electrically isolated nanostructures fabricated using self-assembled multilayers and a novel negative-tone bi-layer resist stack

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1517-1520

  Srinivasan, Charan ^a   Anderson, Mary E ^b   Jayaraman, R ^a   Weiss, Paul S ^b   Horn, Mark W ^a  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Molecular rulers; Nanolithography; Self assembly; SU 8

Indexed keywords

ELECTROCHEMICAL ELECTRODES; LITHOGRAPHY; MULTILAYERS; SELF ASSEMBLY; THICKNESS CONTROL;

LIFT-OFF RESIST (LOR); MOLECULAR RULERS; NANOELECTRODES; SU-8;

NANOSTRUCTURED MATERIALS;

EID: 33646034314     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.265     Document Type: Article

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