SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 6, 2007, Pages 2034-2037

Enhanced stitching for the fabrication of photonic structures by electron beam lithography

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ERROR ANALYSIS; NUMERICAL METHODS; PHOTONIC DEVICES; PROBLEM SOLVING;

PHOTONIC STRUCTURES; PHOTONIC WIRE WAVEGUIDES; STITCHING ERRORS;

PHOTONICS;

EID: 37149003942 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2800325 Document Type: Article

Times cited : (22)

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