Tilt-corrected stitching for electron beam lithography

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 793-796

  Thoms, S ^a   Macintyre, D S ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

Electron beam lithography; Stitching; Tilt

Indexed keywords

ERROR ANALYSIS; ERROR CORRECTION; WAFER BONDING;

KEYSTONE ERRORS; STITCHING ERROR; TILT;

ELECTRON BEAM LITHOGRAPHY;

EID: 34247631680     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.127     Document Type: Article

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