Measurement of incomplete strain relaxation in a silicon heteroepitaxial film by geometrical phase analysis in the transmission electron microscope

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Chung, Jayhoon ^a,b   Rabenberg, Lew ^a  

^a The University of Texas at Austin   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; EPITAXIAL FILMS; FINITE ELEMENT METHOD; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE ANALYSIS; SILICON;

GEOMETRICAL PHASE ANALYSIS; GLIDE DISLOCATION;

STRAIN RELAXATION;

EID: 36849084481     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2821843     Document Type: Article

References (15)

1. J. Welser, J. L. Hoyt, S. Takagi, and J. F. Gibbons, Tech. Dig. - Int. Electron Devices Meet. 1994, 373.
2. D. K. Nayak, J. C. S. Woo, J. S. Park, K. L. Wang, and K. P. MacWilliams, Appl. Phys. Lett. 62, 2853 (1993).
3. P. M. J. Maŕe, J. C. Barbour, J. F. Van der Veen, K. L. Kavanagh, C. T. W. Bulle-Lieuwma, and P. A. Viergers, J. Appl. Phys. 62, 4413 (1987).
4. Y. Kimura, N. Sugii, S. Kimura, K. Inui, and W. Hirasawa, Appl. Phys. Lett. 88, 031912 (2006).
5. S. W. Bledell, K. Fogel, D. K. Sadana, H. Chen, and A. Domenicucci, Appl. Phys. Lett. 85, 2493 (2004).
6. N. Nirashita, N. Sugiyama, E. Toyoda, and S. Takagi, Appl. Phys. Lett. 86, 221923 (2005).
7. A. F. Marshall, D. B. Aubertine, W. D. Nix, and P. C. McIntyre, J. Mater. Res. 20, 447 (2005).
8. M. J. Htch, E. Snoeck, and R. Kilaas, Ultramicroscopy 74, 131 (1998).
9. E. Snoeck, B. Warot, H. Ardhuin, A. Rocher, M. J. Casanove, R. Kilaas, and M. J. Htch, Thin Solid Films 319, 157 (1998).
10. M. J. Htch and T. Plamann, Ultramicroscopy 87, 199 (2001).
11. M. J. Htch, J. Putaux, and J. Ṕnisson, Nature (London) 423, 270 (2003).
12. J. Chung and L. Rabenberg, Effects of Strain Gradients on Strain Measurements using Geometrical Phase Analysis in the Transmission Electron Microscope., Ultramicroscopy (submitted).
13. C. G. Van de Walle, Phys. Rev. B 39, 1871 (1989).
14. J. P. Hirth and J. Lothe, Theory of Dislocations (McGraw-Hill, New York, 1968), p. 304.
15. J. Narayan and S. Oktyabrsky, J. Appl. Phys. 92, 7122 (2002).