Micromachined biomimetic artificial haircell sensors

Bioinspiration and Biomimetics

Volumn 2, Issue 4, 2007, Pages

  Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL SENSORS; FABRICATION METHOD; MATERIAL SYSTEMS; MICRO-MACHINED; MODULAR BUILDINGS;

BIOMIMETICS; MODULAR CONSTRUCTION;

SENSORS;

ANIMAL; BIOLOGICAL MODEL; BIOMIMETICS; CONFERENCE PAPER; HUMAN; INSTRUMENTATION; MECHANORECEPTOR; MECHANOTRANSDUCTION; METHODOLOGY; PHYSIOLOGY; SENSORY NERVE CELL; TRANSDUCER;

ANIMALS; BIOMIMETICS; HUMANS; MECHANORECEPTORS; MECHANOTRANSDUCTION, CELLULAR; MODELS, BIOLOGICAL; NEURONS, AFFERENT; TRANSDUCERS;

EID: 36549021063     PISSN: 17483182     EISSN: 17483190     Source Type: Journal    
DOI: 10.1088/1748-3182/2/4/S05     Document Type: Conference Paper

References (34)

1. Delcomyn F 1996 Foundations of Neurobiology (New York: Freeman)
2. Dallos P and Evans B 1995 High-frequency motility of outer hair cells and the cochlear amplifier Science 267 2006-9
3. Barth F G, Humphrey J A C and Secomb T W 2003 Sensors and Sensing in Biology and Engineering (Vienna: Springer)
4. Deocomyn F 1996 Foundations of Neurobiology (San Francisco: Freeman)
5. Bathellier B, Barth F G, Albert J T and Humphrey J A C 2005 Viscosity-mediated motion coupling between pairs of trichobothria on the leg of the spider Cupiennius Salei J. Compar. Physiol. A 191 733-46
6. Barth F G, Humphrey J A C and Secomb T W 2003 Sensors and Sensing in Biology and Engineering (Vienna: Springer)
7. Engelmann J, Hanke W, Mogdans J and Bleckmann H 2000 Hydrodynamic stimuli and the fish lateral line Nature 408 51-2
8. Liao J C, Beal D N, Lauder G V and Triantafyllou M S 2003 Fish exploiting vortices decrease muscle activity Science 302 1566-9
9. Engelmann J, Hanke W and Bleckmann H 2002 Lateral line reception in still- and running water J. Compar. Physiol. A 188 513-26
10. Miller G 2005 Bats have a feel for flight Science 310 1260-1
11. Galvao R, Israeli E, Song A, Tian X, Bishop K, Swartz S and Breuer K 2006 The aerodynamics of compliant membrane wings modeled on mammalian flight mechanics presented at 36th AIAA Fluid Dynamics Conference and Exhibit (San Francisco)
12. Singla V and Reiter J F 2006 The primary cilium as the cell's antenna: signaling at a sensory organelle Science 313 629-33
13. He D Z Z and Dallos P 1999 Somatic stiffness of cochlear outer hair cells is voltage-dependent Proc. Natl Acad. Sci. 96 8223-8
14. Liu C 2005 Foundations of MEMS (Englewood Cliffs, NJ: Prentice-Hall)
15. Ozaki M, Wada-Katsumata A, Fujikawa K, Iwasaki M, Yokohari F, Satoji Y, Nisimura T and Yamaoka R 2005 Ant nestmate and non-nestmate discrimination by a chemosensory sensillum Science 309 311-4
16. Schaller R R 1997 Moore's law: past, present, and future IEEE Spectr. 34 52-9
17. Ghosh S, Sood A K and Kumar N 2003 Carbon nanotube flow sensors Science 299 1042-4
18. Svensson L, Plaza J A, Benitez M A, Esteve J and Lora-Tamayo E 1996 Surface micromachining technology applied to the fabrication of a FET pressure sensor J. Micromech. Microeng. 6 80-3
19. Wur D R, Davidson J L, Kang W P and Kinser D L 1995 Polycrystalline diamond pressure sensor J. Microelectromech. Syst. 4 34-41
20. Wang L, Wold R A, Wang Y, Deng K K, Zou L, Davis R J and Trolier-McKinstry 2003 Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers J. Microelectromech. Syst. 12 433-9
21. Bernstein J, Miller R, Kelley W and Ward P 1999 Low-noise MEMS vibration sensor for geophysical applications J. Microelectromech. Syst. 8 433-8
22. Madou M J 2002 Fundamentals of Microfabrication: The Science of Miniaturization 2nd edn (Boca Raton, FL: CRC Press)
23. Li J, Fan Z, Chen J, Zou J and Liu C 2002 High yield microfabrication process for biomimetic artificial haircell sensors Presented at Smart Electronics, MEMS, and Nanotechnology Conference, Proc. SPIE 4700 315-22
24. Chen J, Fan Z, Zou J, Engel J and Liu C 2003 Two dimensional micromachined flow sensor array for fluid mechanics studies ASCE J. Aerospace Eng. 16 85-97
25. Engel J, Chen J, Bullen D and Liu C 2005 Polyurethane rubber as a MEMS material: characterization and demonstration of an all-polymer two-axis artificial haircell flow sensor, presented at 18th IEEE Int. Conf. Micro Electro Mechanical Systems, MEMS 2005 (Miami Beach, FL, 2005)
26. Chen N, Chen J, Engel J, Pandya S, Tucker C and Liu C 2006 Development and characterization of high sensitivity bioinspired artificial haircell sensor, Presented at The 12th Solid State Sensors, Actuator, and Microsystems Workshop (Hilton Head, SC, 2006)
27. Krijnen G J M, Dijkstra M, van Baar J J, Shankar S S, Kuipers W J, de Boer R J H, Altpeter D, Lammerink T S J and Wiegerink R 2006 MEMS based hair flow-sensors as model systems for acoustic perception studies Nanotechnology 17 S84-9
28. Ozaki Y, Ohyama T, Yasuda T and Shimoyama I 2000 An air flow sensor modeled on wind receptor hair of insects, Presented at Int. Conf. MEMS (Miyazaki, Japan, 2000)
29. Zou J, Chen J, Liu C and Schutt-Aine J 2001 Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: technology and application IEEE/ASME J. Microelectromech. Syst. 10 302-9
30. Engel J, Chen J, Liu C and Bullen D 2006 Polyurethane rubber all-polymer artificial hair cell sensor IEEE/ASME J. Microelectromechan. Syst. 15 729-36
31. Ryu K, Wang X, Shaikh K and Liu C 2004 A method for precision patterning of silicone elastomer and its applications J. Microelectromech. Syst. 13 568-75
32. Pandya S D, Yang Y, Jones D, Engel J and Liu C 2006 Multisensor processing algorithms for underwater dipole localization and tracking using MEMS artificial lateral line sensors EURASIP J. Appl. Signal Process. 2006 art id 76593
33. Fan Z, Engel J M, Chen J and Liu C 2004 Parylene surface-micromachined membranes for sensor applications J. Microelectromech. Syst. 13 484-90
34. Mayer G 2005 Rigid biological systems as models for synthetic composites Science 310 1144-7