High yield micro fabrication process for biomimetic artificial haircell sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4700, Issue , 2002, Pages 315-322

  Li, Junjun ^a   Fan, Zhifang ^a   Chen, Jack ^a   Zou, Jun ^a   Liu, Chang ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CANTILEVER BEAMS; FABRICATION; MAGNETIC FIELD EFFECTS; MICROMACHINING; MICROSTRUCTURE; PLASTIC DEFORMATION; STRESS CONCENTRATION;

ARTIFICIAL HAIRCELL SENSORS;

BIOMIMETIC MATERIALS;

EID: 0036030979     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475045     Document Type: Conference Paper

References (7)

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