Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 279-282

  Engel, J M ^a   Chen, J ^a   Bullen, D ^a   Liu, C ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CELLS; CHEMICAL RESISTANCE; CURING; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; PYROLYSIS; RESISTORS; SENSITIVITY ANALYSIS; SENSORS; SOLVENTS; SYNTHETIC RUBBER;

POLYDIMETHYLSILOXANE (PDMS); POLYURETHANE ELASTOMERS; POLYURETHANE RUBBERS; TWO-PART ROOM TEMPERATURE CURING;

POLYURETHANES;

EID: 26844537016     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. S. Coombs, "Smart skins: information processing by lateral line flow sensors," Autonomous Robots, vol. 11, pp. 255-261, 2001.
2. A. R. Moller, Sensory Systems: Anatomy and Physiology. San Diego: Academic Press, 2003.
3. S. M. vanNetten and S. M. Khanna, "Stiffness changes of the cupula associated with the mechanics of hair cells in the fish lateral line," Proceedings of the National Academy of Sciences, vol. 91, pp. 1549-53, 1994.
4. S. M. vanNetten, T. Dinklo, W. Marcotti, and C. J. Kros, "Channel gating forces govern accuracy of mechano-electrical transduction in hair cells," Proceedings of the National Academy of Sciences, vol. 100, pp. 15510-15, 2003.
5. Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, and F. Delcomyn, "Design and Fabrication of Artificial Lateral-Line Flow Sensors," Journal of Micromechanics and Microengineering, vol. 12, pp. 655-661, 2002.
6. Y. Ozaki, T. Ohyama, T. Yasuda, and I. Shimoyama, "Air flow sensor modeled on wind receptor hairs of insects," presented at IEEE International Conference On MEMS, 2000.
7. J. Chen, J. M. Engel, and C. Liu, "Development of polymer-based artificial haircell using surface micromachining and 3D assembly," presented at 12th International Conference on Solid-State Sensors, Actuators, and Microsystems, Boston, 2003.
8. K. Ryu, X. Wang, K. Shaikh, and C. Liu, "A method for precision patterning of silicone elastomer and its applications," Journal of Microelectromechanical Systems, vol. 13, pp. 568-575, 2004.
9. K. Shida and J. I. Yuji, "Discrimination of Material Property by Pressure-Conductive Rubber Sheet Sensor with Multi-sensing Function," presented at IEEE International Symposium on Industrial Electronics, 1996.
10. A. Bratov, J. Munoz, C. Dominguez, and J. Bartroli, "Photocurable polymers applied as encapsulating materials for ISFET production," Sensors and Actuators B, vol. 25, pp. 823-825, 1995.
11. J.-U. Meyer and M. Biehl, "Micropatterned biocompatible materials with applications for cell cultivation," Journal of Micromechanics and Microengineering, vol. 5, pp. 172-174, 1995.
12. D. Campolo, S. Jones, and R. S. Fearing, "Fabrication of gecko foot-hair like nano structures and adhesion to random rough surfaces," presented at IEEE Conference on Nanotechnology, 2003.
13. E. Segal, R. Tchoudakov, M. Narkis, and A. Siegmann, "Sensing of liquids by electrically conductive immiscible polypropylene / thermoplastic polyurethane blends containing carbon black," Journal of Polymer Science: B, vol. 41, pp. 1428-40, 2003.