Kinetics, stoichiometry, morphology, and current drive capabilities of Ir-based silicides

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  Larrieu, G ^a   Dubois, E ^a   Wallart, X ^a   Katcki, J ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY BARRIERS; IRIDIUM; RAPID THERMAL PROCESSING; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ANNEALING TEMPERATURE; CURRENT DRIVE CAPABILITIES; KINETIC COEFFICIENTS; SCHOTTKY BARRIER HEIGHT;

SILICIDES;

EID: 36248944957     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2802564     Document Type: Article

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