RBS and SIMS study of the simultaneous phase growth of iridium suicides formed by RTA in vacuum

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1040-1044

  Almendra, A ^a   Serrano, J J ^a   Kling, A ^b   Rodriguez T ^a   Blanco, J M ^a   Da Silva, M F ^c   Sanz Maudes, J ^a   Aguilar, M ^a   Soares, J C ^b  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c INT   (Portugal)

Author keywords

Diffusion coefficient; Iridium silicides; Kinetics; RBS; Reaction constants; SIMS

Indexed keywords

ACTIVATION ENERGY; ANNEALING; DIFFUSION IN SOLIDS; GROWTH (MATERIALS); IRIDIUM COMPOUNDS; NUMERICAL ANALYSIS; REACTION KINETICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; THERMAL EFFECTS; VACUUM APPLICATIONS;

IRIDIUM SILICIDES;

NUCLEAR INSTRUMENTATION;

EID: 0032020881     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00793-3     Document Type: Article

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