Multi-technique platform for dynamic and static MEMS characterisation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 2, 2007, Pages

  Gastinger, Kay ^a   Løvhaugen, Pål ^b   Skotheim, Øystein ^a   Hunderi, Ola ^b  

^a SINTEF ICT   (Norway)

^b NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

Laser interferometry; Low Coherence Interferometry (LCI); Low Coherence Speckle Interferometry (LCSI); Low coherence interferometry; Microscopic Electronic Speckle Pattern Interferometry (ESPI); Microscopic Optical Coherence Tomography (OCT)

Indexed keywords

INTERFEROMETERS; LASER INTERFEROMETRY; OPTICAL TOMOGRAPHY; PRESSURE SENSORS; SILICON WAFERS; SPECKLE;

DIGITAL HOLOGRAPHY; ELECTRONIC SPECKLE PATTERN INTERFEROMETRY; LOW COHERENCE INTERFEROMETRY (LCI); MACH-ZEHNDER INTERFEROMETER; VACUUM CAVITY;

MEMS;

EID: 36248934225     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726307     Document Type: Conference Paper

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