Fabrication of multi-layer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 111-114

  Gorecki, Christophe ^a   Khalfallah, S ^b  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; LASERS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; SEMICONDUCTING GALLIUM COMPOUNDS; SENSORS;

VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

NANOSTRUCTURED MATERIALS;

EID: 0035758707     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445593     Document Type: Article

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