Confocal micro-optical distance sensor: Principle and design

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART I, Issue , 2005, Pages 128-135

  Ruprecht, Aiko K ^a   Pruss, Christof ^a   Tiziani, Hans J ^d   Osten, Wolfgang ^a   Lücke, Peter ^b   Last, Arndt ^b   Mohr, Jürgen ^b   Lehmann, Peter ^c  

^a UNIVERSITY OF STUTTGART   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c Mahr GmbH   (Germany)

^d NONE

Author keywords

Chromatic; Confocal; Fiber optical; Miniaturized; Point sensor

Indexed keywords

DEPTH INDICATORS; FITS AND TOLERANCES; OPTICAL DESIGN; OPTICAL VARIABLES MEASUREMENT;

CHROMATIC; CONFOCAL; FIBER-OPTICAL; MINIATURIZED; POINT SENSORS;

OPTICAL SENSORS;

EID: 28844487055     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612008     Document Type: Conference Paper

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