MEMS Characterization using New Hybrid Laser Doppler Vibrometer / Strobe Video System

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 45-54

  Lawrence, Eric M ^a   Rembe, Christian ^a  

^a POLYTEC GMBH   (Germany)

Author keywords

Characterization; Laser Doppler vibrometer; Machine vision; Mechanical; MEMS; Microscopic; Vibration

Indexed keywords

LASER DOPPLER VIBROMETERS (LDV); MICRO MOTION ANALYSIS (MMA); MICRO SCANNING VIBROMETERS (MSV); PICOMETERS;

AUTOMATION; COMPUTER VISION; DAMPING; MICROSCOPIC EXAMINATION; MOTION ESTIMATION; NATURAL FREQUENCIES; SCANNING; STROBOSCOPES; SYSTEMS ANALYSIS; THERMAL EFFECTS; VIBRATION MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 2142825324     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524565     Document Type: Conference Paper

References (9)

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