Promise and challenge of DUV speckle interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4933, Issue , 2003, Pages 117-122

  Aswendt, Petra ^a  

^a FRAUNHOFER INSTITUTE FOR MACHINE TOOLS AND FORMING TECHNOLOGY IWU   (Germany)

Author keywords

Deep ultraviolet laser; MEMS; Microsystems; Speckle interferometry

Indexed keywords

INTERFEROMETRY; LENSES; MICROELECTROMECHANICAL DEVICES; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET LASERS;

SPECKLE;

EID: 0242552731     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.516619     Document Type: Conference Paper

References (6)

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