Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3749, Issue , 1999, Pages 468-469

  Hart, Matthew ^a   Conant, Robert ^a   Lau, Kam ^a   Muller, Richard ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MIRRORS; PHASE SHIFT; SURFACE STRUCTURE;

STROBOSCOPIC PHASE SHIFTING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0032661901     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)