A compact ESPI system for displacement measurements of specular reflecting or optical rough surfaces

Optics and Lasers in Engineering

Volumn 41, Issue 1, 2004, Pages 73-80

  Hansen, René Skov ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Contouring; Diffuse illumination; ESPI; Eye deformation; MEMS displacements measurements; Speckle interferometry; Specular surface; Vibration

Indexed keywords

INTERFEROMETERS; LASER BEAMS; LIGHT SCATTERING; LIGHTING; SPECKLE; SURFACE ROUGHNESS;

DISPLACEMENT MEASUREMENTS;

LIGHT REFLECTION;

EID: 0141615800     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00135-5     Document Type: Article

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