Laser waveguide microinterferometer integrated with MEMS platforms

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5958, Issue , 2005, Pages 1-7

  Salbut, Leszek ^a   Kujawinska, Malgorzata ^a   Krezel, Jerzy ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Digital holography; ESPI; Grating interferometry; Interferometry; MEMS MOEMS characterization; Optical methods of testing

Indexed keywords

GROWTH (MATERIALS); INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS; VECTORS;

DIGITAL HOLOGRAPHY; GRATING INTERFEROMETRY; MEMS/MOEMS CHARACTERIZATION; OPTICAL METHODS OF TESTING;

OPTICAL WAVEGUIDES;

EID: 32344437436     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.623002     Document Type: Conference Paper

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