A study on the viscous damping effect for diaphragm-based acoustic MEMS applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 11, 2007, Pages 2253-2263

  Tan, Chee Wee ^a   Wang, Zhihong ^a   Miao, Jianmin ^a   Chen, Xiaofeng ^a,b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; COST EFFECTIVENESS; DAMPING; FREQUENCY RESPONSE; MICROPHONES; OPTIMIZATION; RELIABILITY; SILICON; THERMAL NOISE;

MASS PRODUCTION; VISCOUS DAMPING;

MEMS;

EID: 35648991492     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/11/012     Document Type: Article

References (27)

1. Gabrielson T B 1993 IEEE Trans. Electron Devices 40 903-9
2. Scheeper P R, van der Donk A G H, Olthuis W and Bergveld P 1994 Sensors Actuators A 44 1-11
3. Sessler G M 1996 J. Audio Eng. Soc. 44 16-22
4. Thielemann C and Sessler G M 1997 Acustica 83 715-20
5. Kühnel W and Hess G 1992 Sensors Actuators A 30 251-8
6. Scheeper P R, Olthuis W and Bergveld P 1994 Sensors Actuators A 40 179-86
7. Scheeper P R, Nordstrand B, Gulløv J O, Liu B, Clausen T, Midjord L and Storgaard-Larsen 2003 J. Microelectromech. Syst. 12 880-91
8. Bergqvist J and Rudolf F 1994 Sensors Actuators A 45 115-24
9. Hsu P C, Mastrangelo C H and Wise K D 1998 Proc. 11th IEEE Workshop on MEMS (Heidelberg, Germany) pp 580-5
10. Kabir A E, Bashir R, Bernstein J, DeSantis J, Mathews R, O'Boyle J O and Bracken C 1999 Sensors Actuators A 78 138-42
11. Pedersen M, Olthuis W and Bergveld P 1997 Sensors Actuators A 63 97-104
12. Li X, Lin R, Kek H S, Miao J M and Zou Q 2001 Sensors Actuators A 92 257-62
13. Wang W J, Lin R M, Zou Q B and Li X X 2004 J. Micromech. Microeng. 14 403-9
14. Füldner M, Dehé A and Lerch R 2005 IEEE Sensors J. 5 857-63
15. Hohm D and Hess G 1989 J. Acoust. Soc. Am. 85 476-80
16. Kühnel W and Hess G 1992 Sensors Actuators A 32 560-4
17. Zuckerwar A J 1978 J. Acoust. Soc. Am. 64 1278-85
18. Tan C W and Miao J M 2006 J. Acoust. Soc. Am. 120 750-61
19. Robert P R, Kim E S, Hong D M and Muller R S 1993 J. Microelectromech. Syst. 2 111-20
20. Han C H and Kim E S 2000 Proc. 13th IEEE Int. Conf. on MEMS (Miyazaki, Japan) pp 148-52
21. Yi S H and Kim E S 2002 Proc. 15th IEEE Int. Conf. on MEMS (Las Vegas, USA) pp 260-3
22. Ko S C, Kim Y C, Lee S S, Choi S H and Kim S R 2003 Sensors Actuators A 103 130-4
23. Zuckerwar A J 1995 Principles of operation of condenser microphones AIP Handbook of Condenser Microphone: Theory, Calibration and Measurements ed G S K Wong and T F W Embleton (New York: American Institute of Physics) pp 37-69 chapter 3
24. Oh K W, Han A, Bhansali S and Ahn C H 2002 J. Micromech. Microeng. 12 187-91
25. Fu L, Miao J M, Li X X and Lin R M 2001 Appl. Surf. Sci. 177 78-84
26. Gao J X, Yeo L P, Chan-Park M B, Miao J M, Yan Y H, Sun J B, Lam Y C and Yue C Y 2006 J. Microelectromech. Syst. 15 84-93
27. Dixit P and Miao J M 2006 J. Electrochem. Soc. 153 G552-9