Analytical modeling for bulk-micromachined condenser microphones

Journal of the Acoustical Society of America

Volumn 120, Issue 2, 2006, Pages 750-761

  Chee, Wee Tan ^a   Miao, Jianmin ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING;

ACOUSTIC HOLES; MECHANICAL-THERMAL NOISE; OPEN-CIRCUIT SENSITIVITY; SILICON CONDENSER MICROPHONE;

MICROPHONES;

SILICON;

ACOUSTICS; ARTICLE; ELECTRIC POTENTIAL; ELECTRONICS; MECHANICS; MICROELECTROMECHANICAL SYSTEM MICROPHONE; MICROPHONE; NOISE; PRIORITY JOURNAL; SIGNAL NOISE RATIO; TECHNOLOGY; THEORETICAL MODEL;

EID: 33747045256     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.2216561     Document Type: Article

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