High sensitivity acoustic transducers with thin p+ membranes and gold back-plate

Sensors and Actuators, A: Physical

Volumn 78, Issue 2, 1999, Pages 138-142

  Kabir, A E ^a   Bashir, R ^b   Bernstein, J ^c   De Santis, J ^a   Mathews, R ^a   O'Boyle, J O ^a   Bracken, C ^a  

^a NATIONAL SEMICONDUCTOR CORPORATION   (United States)

^b PURDUE UNIVERSITY   (United States)

^c CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ETCHING; FREQUENCY RESPONSE; MICROMACHINING; MICROPHONES; SILICON WAFERS;

SILICON MICROPHONES;

ACOUSTIC TRANSDUCERS;

EID: 0033361247     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00242-3     Document Type: Article

References (8)

1. For a good overview of silicon micro-machining and related applications, see the special issue of Proceedings of the IEEE, Vol. 86, No. 8, 1998.
2. Royer M., Holmen J.O., Wurm M.A., Aadland O.S., Glenn M. ZnO on Si integrated acoustic sensor. Sensors and Actuators. 4:1983;357-362.
3. Kuhnel W., Hess G. Micro-machined subminiature condenser microphones in silicon. Sensors and Actuators A. 32:1992;560-564.
4. Hohm D., Hess G. A subminiature condenser microphone with silicon nitride membrane and silicon back plate. J. Acoust. Soc. Am. 85:1989;476-480.
5. P.R. Scheeper, W. Olthuis, P. Bergveld, Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, USA, June 24-28, 1991, 408-411.
6. J.J. Bernstein, J.T. Borenstein, A Micromachined Silicon Condenser Microphone With On-Chip Amplifier, Technical Digest of the Solid State Sensors and Actuators Workshop, Hilton Head Island, 1996, pp. 239-243.
7. Pedersen M., Olthuis W., Bergveld P. Integrated silicon capacitive microphone with frequency-modulated digital output. Sensors and Actuators, A: Physical. 33:1998;267-275.
8. Pedersen M., Olthuis W., Bergveld P. High-performance condenser microphone with fully integrated CMOS amplifier and dc-dc voltage converter. Journal of Microelectromechanical Systems. 7(4):1998;387-394.