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Volumn 47, Issue 12, 2007, Pages 2082-2087

Electrical measurements of voltage stressed Al2O3/GaAs MOSFET

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; ELECTRON TRAPS; GATE DIELECTRICS; LEAKAGE CURRENTS; MOS DEVICES; SEMICONDUCTING GALLIUM ARSENIDE; THRESHOLD VOLTAGE; VOLTAGE MEASUREMENT;

EID: 35548979405     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.02.012     Document Type: Article
Times cited : (11)

References (13)
  • 2
    • 0042341502 scopus 로고    scopus 로고
    • GaAs metal-oxide-semiconductor field effect transistor with nanometer-thin dielectric grown by atomic layer deposition
    • Ye P.D., Wilk G.D., Yang B., Kwo J., Chu S.N.G., Nakahara S., et al. GaAs metal-oxide-semiconductor field effect transistor with nanometer-thin dielectric grown by atomic layer deposition. Appl Phys Lett 83 (2003) 180-182
    • (2003) Appl Phys Lett , vol.83 , pp. 180-182
    • Ye, P.D.1    Wilk, G.D.2    Yang, B.3    Kwo, J.4    Chu, S.N.G.5    Nakahara, S.6
  • 3
    • 14844312078 scopus 로고    scopus 로고
    • Ma TP. Opportunities and challenges for high-k gate dielectrics. In: Proceedings of the IEEE IPFA'04; 2004. p. 1-4.
  • 9
    • 0001004010 scopus 로고    scopus 로고
    • Model for the current-voltage characteristics of ultrathin gate oxides after soft breakdown
    • Houssa M., Nigam T., Mertens P.W., and Heyns M.M. Model for the current-voltage characteristics of ultrathin gate oxides after soft breakdown. J Appl Phys 84 (1998) 4351-4355
    • (1998) J Appl Phys , vol.84 , pp. 4351-4355
    • Houssa, M.1    Nigam, T.2    Mertens, P.W.3    Heyns, M.M.4
  • 10
    • 0000842547 scopus 로고    scopus 로고
    • Soft breakdown in ultrathin gate oxides: correction with the percolation theory of nonlinear conductors
    • Houssa M., Nigam T., Mertens P.W., and Heyns M.M. Soft breakdown in ultrathin gate oxides: correction with the percolation theory of nonlinear conductors. Appl Phys Lett 73 (1998) 514-516
    • (1998) Appl Phys Lett , vol.73 , pp. 514-516
    • Houssa, M.1    Nigam, T.2    Mertens, P.W.3    Heyns, M.M.4
  • 11
    • 0029514106 scopus 로고
    • A consistent model for the thickness dependence of intrinsic breakdown in ultrathin oxides
    • Degraeve R., Groeseneken G., Bellens R., Depas M., and Maes H.E. A consistent model for the thickness dependence of intrinsic breakdown in ultrathin oxides. IEEE Electr Dev Meet (1995) 863-866
    • (1995) IEEE Electr Dev Meet , pp. 863-866
    • Degraeve, R.1    Groeseneken, G.2    Bellens, R.3    Depas, M.4    Maes, H.E.5
  • 12
  • 13
    • 0038650830 scopus 로고    scopus 로고
    • Charge trapping related threshold voltage instabilities in high permittivity gate dielectric stacks
    • Zafar S., Callegari A., Gusev E., and Fischetti M.V. Charge trapping related threshold voltage instabilities in high permittivity gate dielectric stacks. J Appl Phys 93 (2003) 9298-9303
    • (2003) J Appl Phys , vol.93 , pp. 9298-9303
    • Zafar, S.1    Callegari, A.2    Gusev, E.3    Fischetti, M.V.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.