Ferroelectric lithography

Ceramics International

Volumn 34, Issue 1, 2008, Pages 157-164

  Li, Dongbo ^a   Bonnell, Dawn A ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Ferroelectric; Lithography; Nanostructure; Patterning

Indexed keywords

ELECTRODES; ELECTRONS; LITHOGRAPHY; NANOSTRUCTURES; PARAMETER ESTIMATION; POLARIZATION;

COMPLEX STRUCTURES; FERROELECTRIC SUBSTRATES; PHYSICAL INTERACTIONS;

FERROELECTRIC MATERIALS;

EID: 35448979042     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2006.09.021     Document Type: Article

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