Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

Applied Physics Letters

Volumn 83, Issue 4, 2003, Pages 728-730

  Gruverman, A ^a   Rodriguez, B J ^a   Kingon, A I ^a   Nemanich, R J ^a   Tagantsev, A K ^b   Cross, J S ^c   Tsukada, M ^c  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Ceramics Laboratory Ecole Polytechnique Federale de Lausanne   (Switzerland)

^c FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; POLARIZATION; STRESS ANALYSIS; SWITCHING;

PIEZORESPONSE FORCE MICROSCOPY;

CAPACITORS;

EID: 0043014781     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1593830     Document Type: Article

References (23)

1. J. S. Speck, A. Seifert, W. Pompe, and R. Ramesh, J. Appl. Phys. 76, 477 (1994).
2. W. Pompe, X. Gong, Z. Suo, and J. S. Speck, J. Appl. Phys. 74, 6012 (1993).
3. N. A. Pertsev, A. G. Zembilgotov, and A. K. Tagantsev, Phys. Rev. Lett. 80, 1988 (1998).
4. R. Bruinsma and A. Zangwill, J. Phys. (France) 47, 2055 (1986).
5. F. Xu, F. Chu, and S. Trolier-McKinstry, J. Appl. Phys. 86, 588 (1999).
6. D. Berlincourt, J. Acoust. Soc. Am. 70, 1586 (1981).
7. S. B. Desu, J. Electrochem. Soc. 140, 2981 (1993).
8. T. Kumazawa, Y. Kumagai, H. Miura, M. Kitano, Appl. Phys. Lett. 72, 608 (1998).
9. L. Roytburd, S. P. Alpay, V. Nagarajan, C. S. Ganpule, S. Aggarwal, E. D. Williams, and R. Ramesh, Phys. Rev. Lett. 85, 190 (2000).
10. S. Buhlmann, B. Dwir, J. Baborowski, and P. Muralt, Appl. Phys. Lett. 80, 3195 (2002).
11. I. Stolichnov, E. Colla, A. Tagantsev, S. Bharadwaja, S. Hong, N. Setter, J. S. Cross, and M. Tsukada, Appl. Phys. Lett. 80, 4804 (2002).
12. O. Auciello, J. F. Scott, and R. Ramesh, Phys. Today 1998(7), 22 (1998).
13. A. Gruverman, O. Auciello, and H. Tokumoto, Annu. Rev. Mater. Sci. 28, 101 (1998).
14. S. Hong, J. Woo, H. Shin, J. Jeon, Y. E. Pak, E. L. Colla, N. Setter, E. Kim, and K. No, J. Appl. Phys. 89, 1377 (2001).
15. C. S. Ganpule, A. Stanishevsky, Q. Su, S. Aggarwal, J. Melngailis, E. Williams, and R. Ramesh, Appl. Phys. Lett. 75, 409 (1999).
16. M. Alexe, A. Gruverman, C. Harnagea, N. D. Zakharov, A. Pignolet, D. Hesse, and J. F. Scott, Appl. Phys. Lett. 75, 1158 (1999).
17. O. Auciello, A. Gruverman, and H. Tokumoto, Integr. Ferroelectr. 15, 107 (1997).
18. S. V. Kalinin and D. A. Bonnell, Phys. Rev. B 65, 125408 (2002).
19. B. Jaffe, W. R. Cook, and H. Jaffe, Piezoelectric Ceramics (R.A.N. Marietta, OH, 1971).
20. A. K. Tagantsev, Phys. Rev. B 34, 5883 (1986).
21. A. K. Tagantsev, Phase Transitions 35, 119 (1991).
22. W. Ma and L. E. Cross, Appl. Phys. Lett. 79, 4420 (2001).
23. I. S. Zheludev, Yu. S. Likhacheva, and N. A. Lilleyeva, Kristallografiya 14, 514 (1969).