Scanning force microscopy for the study of domain structure in ferroelectric thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 602-605

  Gruverman, A ^a,c   Auciello, O ^b   Tokumoto, H ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

^b MCNC   (United States)

^c URAL FEDERAL UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CRYSTAL STRUCTURE; ELECTRODES; IMAGING TECHNIQUES; LEAD COMPOUNDS; MICROSCOPIC EXAMINATION; PHYSICAL PROPERTIES; POLARIZATION; SOL-GELS; THIN FILMS;

DOMAIN STRUCTURE; FERROELECTRIC THIN FILMS; IMAGING RESOLUTION; PIEZORESPONSE TECHNIQUE; SCANNING FORCE MICROSCOPY; SOL GEL METHOD;

FERROELECTRIC MATERIALS;

EID: 0030109284     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589143     Document Type: Article

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