Structural properties and sensing characteristics of Y2O3 sensing membrane for pH-ISFET

Sensors and Actuators, B: Chemical

Volumn 127, Issue 2, 2007, Pages 480-485

  Pan, Tung Ming ^a   Liao, Kao Ming ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

Annealed at 800 C; Drift rate; Hysteresis; Interfacial SiO2 and silicate formation; Sensing membrane; Sensitivity; Y2O3

Indexed keywords

ANNEALING; SILICATES; SILICON; SURFACE ROUGHNESS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

DRIFT RATE; HYSTERESIS VOLTAGE; SENSING MEMBRANE; SILICATE FORMATION;

CHEMICAL SENSORS;

EID: 35348992183     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.04.050     Document Type: Article

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