Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 B, 2007, Pages 6979-6983

  Osada, Minoru ^a,b   Akatsuka, Kosho ^a   Ebina, Yasuo ^a,b   Funakubo, Hiroshi ^c   Kiguchi, Takanori ^c   Takada, Kazunori ^a,b   Sasaki, Takayoshi ^a,b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

High dielectrics; Layer by layer assembly; Titania nanosheet

Indexed keywords

CURRENT DENSITY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LEAKAGE CURRENTS; MULTILAYER FILMS; NANOSHEETS; PERMITTIVITY;

DIELECTRIC NANOFILMS; TITANIA NANOSHEET;

DIELECTRIC DEVICES;

EID: 35348990866     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6979     Document Type: Article

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